MEMS-compatible structuring of liquid crystal network actuators using maskless photolithography

Abstract We present a method to structure liquid crystal network actuators based on selectively polymerizing the without any physical or hard masks in process compatible with microelectromechanical system (MEMS) technology. The standard glass-cell filling technique is used generate actuator films; subsequently, selected areas are exposed light and thus polymerized actuators. No further machining, such as laser cutting, necessary. polymerization pattern defined by projection using digital micromirror device-based optomechanical setup, resolution ranging from 1 2 mm. These processes photothermally photochemically stimulated actuators, which may be fabricated high throughput easily integrated MEMS devices.